4.3 Article

Roof-Collapsed PDMS Mask for Nanochannel Fabrication

Journal

BULLETIN OF THE KOREAN CHEMICAL SOCIETY
Volume 32, Issue 1, Pages 33-34

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.5012/bkcs.2011.32.1.33

Keywords

Unconventional lithography; Roof-collapsed PDMS mask; Nanochannels

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