Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Published 2008 View Full Article

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Title
Influence of radio frequency power on structure and ionic conductivity of LiPON thin films
Authors
Keywords
-
Journal
BULLETIN OF MATERIALS SCIENCE
Volume 31, Issue 4, Pages 681-686
Publisher
Springer Nature
Online
2008-10-18
DOI
10.1007/s12034-008-0108-z

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