Integration of silicon-via electrodes with different recording characteristics on a glass microprobe using a glass reflowing process

Title
Integration of silicon-via electrodes with different recording characteristics on a glass microprobe using a glass reflowing process
Authors
Keywords
-
Journal
BIOSENSORS & BIOELECTRONICS
Volume 26, Issue 12, Pages 4739-4746
Publisher
Elsevier BV
Online
2011-06-06
DOI
10.1016/j.bios.2011.05.037

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