Journal
BIOMEDICAL MICRODEVICES
Volume 16, Issue 5, Pages 655-660Publisher
SPRINGER
DOI: 10.1007/s10544-014-9868-y
Keywords
SU-8 mould; PDMS; Cast moulding; Sacrificial layer
Funding
- National Natural Science Foundation of China [51075056, 81301040, 91023046, 11372243]
- Program for New Century Excellent Talents in University of China [NCET-10-0284, NCET-12-0437]
- International Science & Technology Cooperation Program of China [2013DFG02930, S2013GR0241]
- China Young 1000-Talent Program, Dalian Foundation of Science and Technology [2012J21DW002]
- Program for Youth Science and Technology Star of Shaanxi Province [2014KJXX-76]
Ask authors/readers for more resources
A novel method for fabricating a three-layer SU-8 mould with inverted T-shaped cavities is presented. The first two SU-8 layers were spin coated and exposed separately, and simultaneously developed to fabricate the bottom and the horizontal part of the inverted T-shaped cavity. Then, a positive photoresist was filled into the cavity, and a wet lapping process was performed to remove the excess photoresist and make a temporary substrate. The third SU-8 layer was spin coated on the temporary substrate to make the vertical part of the inverted T-shaped cavity. The sacrificial photoresist layer can prevent the first two SU-8 layers from being secondly exposed, and make a temporary substrate for the third SU-8 layer at the same time. Moreover, the photoresist can be easily removed with the development of the third SU-8 layer. A polydimethylsiloxane (PDMS) microchip with arrays of T-shaped cantilevers for studying the mechanics of cells was fabricated by using the SU-8 mould.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available