Journal
BIOMEDICAL MICRODEVICES
Volume 12, Issue 2, Pages 197-205Publisher
SPRINGER
DOI: 10.1007/s10544-009-9375-8
Keywords
Electroplated magnet; Impedance pump; Electromagnetic actuator; MEMS; PDMS diaphragm
Funding
- National Science Council in Taiwan [NSC 98-2221-E-020-030, NSC 97-3114-E-110-001]
- Ministry of Economic Affairs in Taiwan [98-EC-17-A-05-S2-0080]
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This study presents a planar valveless impedance-based micropump for biomedical applications comprising a lower glass substrate patterned with a copper micro-coil, a microchannel, an upper glass cover plate, and a PDMS diaphragm with an electroplated magnet on its upper surface. When a current is passed through the micro-coil, an electromagnetic force is established between the coil and the magnet. The resulting deflection of the PDMS diaphragm creates an acoustic impedance mismatch within the microchannel, which in turn produces a net flow. The performance of the micropump is characterized experimentally. The experimental results show that a maximum diaphragm deflection of 30 mu m is obtained when the micro-coil is supplied with an input current of 0.5 A. The corresponding flow rate is found to be 1.5 mu l/sec when the PDMS membrane is driven by an actuating frequency of 240 Hz.
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