Photoluminescence from silicon nanocrystals embedded in silicon nitride fabricated by low-pressure chemical vapor deposition followed by high-temperature annealing

Title
Photoluminescence from silicon nanocrystals embedded in silicon nitride fabricated by low-pressure chemical vapor deposition followed by high-temperature annealing
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 117, Issue 6, Pages 063105
Publisher
AIP Publishing
Online
2015-02-11
DOI
10.1063/1.4907762

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