Chemical Stability of Titania and Alumina Thin Films Formed by Atomic Layer Deposition

Published 2015 View Full Article

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Title
Chemical Stability of Titania and Alumina Thin Films Formed by Atomic Layer Deposition
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 7, Issue 27, Pages 14816-14821
Publisher
American Chemical Society (ACS)
Online
2015-06-24
DOI
10.1021/acsami.5b03278

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