Indium oxide thin film prepared by low temperature atomic layer deposition using liquid precursors and ozone oxidant

Published 2015 View Full Article

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Title
Indium oxide thin film prepared by low temperature atomic layer deposition using liquid precursors and ozone oxidant
Authors
Keywords
Indium oxide, Atomic layer deposition, Transparent conducting oxide, Resistivity
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 649, Issue -, Pages 216-221
Publisher
Elsevier BV
Online
2015-07-20
DOI
10.1016/j.jallcom.2015.07.150

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