High-order theory for arched structures and its application for the study of the electrostatically actuated MEMS devices

Title
High-order theory for arched structures and its application for the study of the electrostatically actuated MEMS devices
Authors
Keywords
High-order beam theory, Legendre polynomial, FEM, MEMS, Pull-in instability
Journal
ARCHIVE OF APPLIED MECHANICS
Volume 84, Issue 7, Pages 1037-1055
Publisher
Springer Nature
Online
2014-04-08
DOI
10.1007/s00419-014-0847-9

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