Low resistivity of Ni–Al co-doped ZnO thin films deposited by DC magnetron sputtering at low sputtering power

Published 2013 View Full Article

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Title
Low resistivity of Ni–Al co-doped ZnO thin films deposited by DC magnetron sputtering at low sputtering power
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 293, Issue -, Pages 55-61
Publisher
Elsevier BV
Online
2013-12-20
DOI
10.1016/j.apsusc.2013.12.071

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