Effect of post-deposition annealing on transverse piezoelectric coefficient and vibration sensing performance of ZnO thin films

Published 2014 View Full Article

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Title
Effect of post-deposition annealing on transverse piezoelectric coefficient and vibration sensing performance of ZnO thin films
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 296, Issue -, Pages 169-176
Publisher
Elsevier BV
Online
2014-01-24
DOI
10.1016/j.apsusc.2014.01.067

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