Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition

Published 2014 View Full Article

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Title
Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 295, Issue -, Pages 260-265
Publisher
Elsevier BV
Online
2014-01-16
DOI
10.1016/j.apsusc.2014.01.027

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