Investigation of subsurface damages and surface roughness in grinding process of Zerodur® glass–ceramic

Title
Investigation of subsurface damages and surface roughness in grinding process of Zerodur® glass–ceramic
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 313, Issue -, Pages 67-75
Publisher
Elsevier BV
Online
2014-05-28
DOI
10.1016/j.apsusc.2014.05.137

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