Surface/interface analysis and optical properties of RF sputter-deposited nanocrystalline titanium nitride thin films

Authors

Keywords

Journal

Volume 292, Issue -, Pages 74-85

Publisher

Elsevier BV

Online

2013-11-25

DOI

10.1016/j.apsusc.2013.11.078

Discuss science. Find collaborators. Network.

Join a conversation

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now