On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films

Published 2012 View Full Article

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Title
On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 269, Issue -, Pages 45-49
Publisher
Elsevier BV
Online
2012-09-23
DOI
10.1016/j.apsusc.2012.09.074

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