Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition

Published 2013 View Full Article

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Title
Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 282, Issue -, Pages 390-395
Publisher
Elsevier BV
Online
2013-06-04
DOI
10.1016/j.apsusc.2013.05.141

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