Electrochemical investigation of copper passivation kinetics and its application to low-pressure CMP modeling

Published 2012 View Full Article

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Title
Electrochemical investigation of copper passivation kinetics and its application to low-pressure CMP modeling
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 265, Issue -, Pages 764-770
Publisher
Elsevier BV
Online
2012-11-29
DOI
10.1016/j.apsusc.2012.11.106

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