Exploring the benefits of depositing hard TiN thin films by non-reactive magnetron sputtering

Published 2013 View Full Article

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Title
Exploring the benefits of depositing hard TiN thin films by non-reactive magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 275, Issue -, Pages 121-126
Publisher
Elsevier BV
Online
2013-01-23
DOI
10.1016/j.apsusc.2013.01.098

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