In situ preparation of high dielectric constant, low-loss ferroelectric BaTiO3 films on Si at 500°C

Published 2013 View Full Article

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Title
In situ preparation of high dielectric constant, low-loss ferroelectric BaTiO3 films on Si at 500°C
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 270, Issue -, Pages 319-323
Publisher
Elsevier BV
Online
2013-01-11
DOI
10.1016/j.apsusc.2013.01.023

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