An upgraded TOF-SIMS VG Ionex IX23LS: Study on the negative secondary ion emission of III–V compound semiconductors with prior neutral cesium deposition

Published 2011 View Full Article

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Title
An upgraded TOF-SIMS VG Ionex IX23LS: Study on the negative secondary ion emission of III–V compound semiconductors with prior neutral cesium deposition
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 7, Pages 2490-2497
Publisher
Elsevier BV
Online
2011-11-12
DOI
10.1016/j.apsusc.2011.10.079

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