Growth of graphene-like thin films at low temperature by dual-frequency capacitively coupled plasma

Published 2012 View Full Article

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Title
Growth of graphene-like thin films at low temperature by dual-frequency capacitively coupled plasma
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 19, Pages 7751-7754
Publisher
Elsevier BV
Online
2012-04-29
DOI
10.1016/j.apsusc.2012.04.133

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