Growth and characterization of Ta/Ti bi-layer films on glass and Si (111) substrates by direct current magnetron sputtering

Published 2012 View Full Article

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Title
Growth and characterization of Ta/Ti bi-layer films on glass and Si (111) substrates by direct current magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 19, Pages 7314-7321
Publisher
Elsevier BV
Online
2012-04-13
DOI
10.1016/j.apsusc.2012.03.176

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