Crystallinity improvement of hexagonal boron nitride films by molybdenum catalysts during microwave plasma chemical vapor deposition and post-annealing

Title
Crystallinity improvement of hexagonal boron nitride films by molybdenum catalysts during microwave plasma chemical vapor deposition and post-annealing
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 24, Pages 10191-10194
Publisher
Elsevier BV
Online
2012-07-07
DOI
10.1016/j.apsusc.2012.06.108

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