Phase transition in sputtered HfO2 thin films: A qualitative Raman study

Published 2012 View Full Article

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Title
Phase transition in sputtered HfO2 thin films: A qualitative Raman study
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 261, Issue -, Pages 727-729
Publisher
Elsevier BV
Online
2012-08-30
DOI
10.1016/j.apsusc.2012.08.088

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