A comparison of the mechanical stability of silicon nitride films deposited with various techniques

Published 2012 View Full Article

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Title
A comparison of the mechanical stability of silicon nitride films deposited with various techniques
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 260, Issue -, Pages 69-72
Publisher
Elsevier BV
Online
2012-04-07
DOI
10.1016/j.apsusc.2012.04.003

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