Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering

Published 2010 View Full Article

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Title
Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 6, Pages 2269-2274
Publisher
Elsevier BV
Online
2010-10-08
DOI
10.1016/j.apsusc.2010.09.086

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