Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering

Title
Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 3, Pages 1261-1266
Publisher
Elsevier BV
Online
2011-09-26
DOI
10.1016/j.apsusc.2011.09.088

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