The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering

Published 2010 View Full Article

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Title
The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 9, Pages 4339-4343
Publisher
Elsevier BV
Online
2010-12-18
DOI
10.1016/j.apsusc.2010.12.053

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