Effect of crystalline structure of TiO2 substrates on initial growth of atomic layer deposited Ru thin films

Published 2010 View Full Article

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Title
Effect of crystalline structure of TiO2 substrates on initial growth of atomic layer deposited Ru thin films
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 9, Pages 4302-4305
Publisher
Elsevier BV
Online
2010-12-18
DOI
10.1016/j.apsusc.2010.12.043

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