Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates

Published 2011 View Full Article

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Title
Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 1, Pages 2-6
Publisher
Elsevier BV
Online
2011-08-03
DOI
10.1016/j.apsusc.2011.07.117

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