Dopant based electron beam lithography in CuxTiSe2

Published 2010 View Full Article

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Title
Dopant based electron beam lithography in CuxTiSe2
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 8, Pages 3812-3816
Publisher
Elsevier BV
Online
2010-12-03
DOI
10.1016/j.apsusc.2010.11.156

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