Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates

Published 2010 View Full Article

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Title
Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 3, Pages 1088-1091
Publisher
Elsevier BV
Online
2010-08-11
DOI
10.1016/j.apsusc.2010.08.019

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