The positive charging effect of dielectric films irradiated by a focused electron beam

Published 2009 View Full Article

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Title
The positive charging effect of dielectric films irradiated by a focused electron beam
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 11, Pages 3482-3492
Publisher
Elsevier BV
Online
2009-12-30
DOI
10.1016/j.apsusc.2009.12.061

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