High-conductive nanocrystalline silicon with phosphorous and boron doping

Title
High-conductive nanocrystalline silicon with phosphorous and boron doping
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 4, Pages 1337-1341
Publisher
Elsevier BV
Online
2010-08-25
DOI
10.1016/j.apsusc.2010.08.065

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