Substrate temperature influenced structural, electrical and optical properties of dc magnetron sputtered MoO3 films

Published 2009 View Full Article

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Title
Substrate temperature influenced structural, electrical and optical properties of dc magnetron sputtered MoO3 films
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 10, Pages 3133-3137
Publisher
Elsevier BV
Online
2009-12-04
DOI
10.1016/j.apsusc.2009.11.086

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