Low-temperature deposition of stoichiometric HfO2 on silicon: Analysis and quantification of the HfO2/Si interface from electrical and XPS measurements

Title
Low-temperature deposition of stoichiometric HfO2 on silicon: Analysis and quantification of the HfO2/Si interface from electrical and XPS measurements
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 1, Pages 17-21
Publisher
Elsevier BV
Online
2010-06-23
DOI
10.1016/j.apsusc.2010.06.012

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