Deposition of thick and adherent Teflon-like coating on industrial scale stainless steel shell using pulsed dc and RF PECVD

Title
Deposition of thick and adherent Teflon-like coating on industrial scale stainless steel shell using pulsed dc and RF PECVD
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 13, Pages 4334-4338
Publisher
Elsevier BV
Online
2010-02-17
DOI
10.1016/j.apsusc.2010.02.027

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