Method to determine the sticking coefficient of precursor molecules in atomic layer deposition

Published 2009 View Full Article

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Title
Method to determine the sticking coefficient of precursor molecules in atomic layer deposition
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 13-14, Pages 6620-6623
Publisher
Elsevier BV
Online
2009-02-25
DOI
10.1016/j.apsusc.2009.02.055

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