Study on sapphire removal for thin-film LEDs fabrication using CMP and dry etching

Published 2009 View Full Article

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Title
Study on sapphire removal for thin-film LEDs fabrication using CMP and dry etching
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 23, Pages 9469-9473
Publisher
Elsevier BV
Online
2009-07-26
DOI
10.1016/j.apsusc.2009.07.063

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