Fabrication of three-dimensional substrates for Li microbatteries on Si

Title
Fabrication of three-dimensional substrates for Li microbatteries on Si
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 3, Pages S61-S64
Publisher
Elsevier BV
Online
2009-05-08
DOI
10.1016/j.apsusc.2009.04.190

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