The effect of substrate bias voltages on impact resistance of CrAlN coatings deposited by modified ion beam enhanced magnetron sputtering

Title
The effect of substrate bias voltages on impact resistance of CrAlN coatings deposited by modified ion beam enhanced magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 7, Pages 4033-4038
Publisher
Elsevier BV
Online
2008-11-11
DOI
10.1016/j.apsusc.2008.10.089

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