Room temperature fabrication Oxide TFT with Y2O3 as a gate oxide and Mo contact

Title
Room temperature fabrication Oxide TFT with Y2O3 as a gate oxide and Mo contact
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 17, Pages 7831-7833
Publisher
Elsevier BV
Online
2009-05-05
DOI
10.1016/j.apsusc.2009.04.175

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