Atomic layer deposition of ytterbium oxide using -diketonate and ozone precursors

Published 2009 View Full Article

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Title
Atomic layer deposition of ytterbium oxide using -diketonate and ozone precursors
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 3, Pages 847-851
Publisher
Elsevier BV
Online
2009-08-28
DOI
10.1016/j.apsusc.2009.08.073

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