Radiofrequency plasma beam deposition of various forms of carbon based thin films and their characterization

Published 2008 View Full Article

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Title
Radiofrequency plasma beam deposition of various forms of carbon based thin films and their characterization
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 10, Pages 5378-5381
Publisher
Elsevier BV
Online
2008-09-08
DOI
10.1016/j.apsusc.2008.08.042

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