Influence of assisted ion energy on surface roughness and mechanical properties of boron carbon nitride films synthesized by DIBSD

Published 2008 View Full Article

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Title
Influence of assisted ion energy on surface roughness and mechanical properties of boron carbon nitride films synthesized by DIBSD
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 7, Pages 4279-4282
Publisher
Elsevier BV
Online
2008-11-26
DOI
10.1016/j.apsusc.2008.11.025

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