Uniform design and regression analysis of LPCVD boron carbide from BCl3–CH4–H2 system

Title
Uniform design and regression analysis of LPCVD boron carbide from BCl3–CH4–H2 system
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 11, Pages 5729-5735
Publisher
Elsevier BV
Online
2009-01-07
DOI
10.1016/j.apsusc.2008.12.075

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