Effect of annealing on the properties of N-doped ZnO films deposited by RF magnetron sputtering

Published 2008 View Full Article

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Title
Effect of annealing on the properties of N-doped ZnO films deposited by RF magnetron sputtering
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 22, Pages 7178-7182
Publisher
Elsevier BV
Online
2008-05-29
DOI
10.1016/j.apsusc.2008.05.321

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