High mobility W-doped In2O3 thin films: Effect of growth temperature and oxygen pressure on structural, electrical and optical properties

Published 2007 View Full Article

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Title
High mobility W-doped In2O3 thin films: Effect of growth temperature and oxygen pressure on structural, electrical and optical properties
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 6, Pages 1661-1665
Publisher
Elsevier BV
Online
2007-07-26
DOI
10.1016/j.apsusc.2007.07.146

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