Thermal evolution of defects produced by implantation of H, D and He in Silicon

Title
Thermal evolution of defects produced by implantation of H, D and He in Silicon
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 1, Pages 63-67
Publisher
Elsevier BV
Online
2008-05-17
DOI
10.1016/j.apsusc.2008.05.171

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