Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 4, Pages 959-961Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2008.05.248
Keywords
Molecular depth profiling; 3D imaging; Depth scale calibration
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Molecular depth profiling of organic overlayers was performed using a mass selected fullerene ion beam in conjunction with time-of-flight ( TOF-SIMS) mass spectrometry. The characteristics of depth profiles acquired on a 300-nm trehalose film on Si were studied as a function of the impact kinetic energy and charge state of the C(60) projectile ions. We find that the achieved depth resolution depends only weakly upon energy. (C) 2008 Elsevier B. V. All rights reserved.
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